TY  - JOUR
AU  - Mahan, A
AU  - Gallagher, A
C2  - Applied Physics Letters
DA  - 2001-01-01
LA  - en
M1  - 78
PB  - Applied Physics Letters
PY  - 2001
TI  - Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 {?}/sec, <!-- Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up 
ER  -