TY  - JOUR
AU  - Pratt, Jon
AU  - Kumanchik, Lee
AU  - Schmitz, Tony
C2  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
DA  - 2011-01-03
LA  - en
PB  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
PY  - 2011
TI  - An interferometric platform for studying AFM probe deflection
ER  -