TY  - CONF
AU  - Hofsaess, H
AU  - Biegel, J
AU  - Ronning, C
AU  - Downing, Robert
AU  - Lamaze, George
C2  - Materials Research Society, Pittsburgh, PA, USA
DA  - 1997-12-01 00:12:00
LA  - en
M1  - 316
PB  - Materials Research Society, Pittsburgh, PA, USA
PY  - 1997
TI  - Characterization of Doped Diamond Like Carbon Films and Multilayers
ER  -