TY  - JOUR
AU  - Giubertoni, D.
AU  - Pepponi, Giancarlo
AU  - Gennaro, Salvatore
AU  - Bersani, Massimo
AU  - Sahiner, M
AU  - Kelty, Stephen
AU  - Doherty, Roisin
AU  - Foad, Majeed
AU  - Kah, Max
AU  - Kirkby, Karen
AU  - Woicik, Joseph
C2  - Journal of Applied Physics
DA  - 2008-11-05 00:11:00
LA  - en
M1  - 104
PB  - Journal of Applied Physics
PY  - 2008
TI  - Correlation of Local Structure and Electrical Activation in Arsenic Ultra Shallow Junctions in Silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854133
ER  -