TY  - JOUR
AU  - Choi, Jinho
AU  - Park, Byong
AU  - Ahn, Sang
AU  - Kim, Dal-Hyun
AU  - Lyou, J
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
AU  - Fu, Joseph
AU  - Vorburger, Theodore
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-08-26 00:08:00
DO  - https://doi.org/10.1117/1.JMM.15.3.034005
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Evaluation of Carbon Nanotube Probes in Critical Dimension Atomic Force Microscopes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920628
ER  -