TY  - JOUR
AU  - DiMeo, F
AU  - Cavicchi, Richard
AU  - Semancik, Stephen
AU  - Suehle, John
AU  - Tea, N
AU  - Small, John
AU  - Armstrong, J
AU  - Kelliher, J
C2  - Journal of Vacuum Science and Technology A
DA  - 1998-02-11 00:02:00
LA  - en
M1  - 16
PB  - Journal of Vacuum Science and Technology A
PY  - 1998
TI  - In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates
ER  -