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Steam Instruments, Inc.
Key Facts
Purpose
Steam Instruments will implement a rapid and accurate high-resolution ion microscopy technology on a prototype instrument and apply it to materials characterization challenges of direct interest to the semiconductor industry, such as inaccurate dopant concentration determinations, incorrect spatial positioning of dopants, compositional identification ambiguities.
Activities to be performed
The awardee will develop a high-resolution ion microscope product to enable rapid and accurate nanoscale characterization.
Expected Outcomes
Instrument will make improvements in composition-versus-structure analysis.
Intended Beneficiaries
U.S. semiconductor industry and researchers.
Subrecipient Activities
The recipient plans to subaward funds for specimen preparation, experimentation and analysis.
Related Links
Read the full CHIPS for America press release by clicking here.