Projects/Programs

Displaying 1 - 4 of 4

Electron Microscopy of Carbon Nanotube Composites

Ongoing

Multi-wall CNTs (MWCNTs) are a common nano-carbon reinforcement material and are frequently dispersed into a polymer matrix to form composites that can be engineered with specific combinations of desirable properties – electrical, thermal, optical and mechanical, etc. However, this

Metrology for Nanoimprint Lithography

Completed

Nanoimprint Lithography (NIL) was originally perceived as a versatile, low-cost, and high-resolution patterning alternative for optical lithography in CMOS fabrication. However, it is becoming apparent that NIL has great potential for nanotechnology in general. It is capable of patterning sub-10 nm

Polymers for Next-Generation Lithography

Completed

We work closely with the semiconductor industry to develop and apply measurements with high-spatial and chemically-specific resolution to elucidate the critical materials properties and process kinetics at nanometer scales that are needed to advance next-generation photolithography, including both

Single Molecule Fluorescence Measurements of Nanoscale Proton Distributions in Photoresist

Completed

Modern photoresists use a process known as chemical amplification to improve their sensitivity. Each incoming photon generates an acid molecule which then diffuses in the photoresist and catalytically causes chemical changes in the resist that result in the formation of an image. The number of

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