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Field evaporates (with a voltage and laser pulse) a sharp tip-shaped specimen. Collects the ionization products in a position-sensitive, time-of-flight mass spectrometer
Can determine the atomic species with sensitivity approaching parts-per-million and atomic positions from within the original analysis volume with sub-nm accuracy
University of Michigan (Ann Arbor), Colorado School of Mines, University of New Mexico, Lawrence Berkeley National Laboratory, NIST: Quantum Processing Group (687.07), Quantitative Nanostructure Characterization Group (686.09), Nanoscale Reliability Group (647.05)