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NanoFab Tool: Bruker Dektak 6M contact profilometer
Bruker Dektak 6M contact profilometer
The Bruker Dektak 6M contact profilometer measures the thickness of patterned thin films by sensing the deflections of a fine stylus riding over feature steps. It can detect depths ranging from 1 mm down to 5 nm and supports substrates ranging from 150 mm diameter wafers down to small pieces.
Specifications/Capabilities
- Maximum step height: 1 mm.
- Vertical resolution: 0.1 nm.
- Scan length: 50 µm to 30 mm.
- Stylus force: 9.8 mN to 147 mN (1 mgf to 15 mgf).
Usage Information
Supported Sample Sizes
- Maximum wafer diameter: 150 mm (6 in).
- Small pieces supported: Yes.
- Maximum thickness: 31 mm.
Typical Applications
- Measurement of etch rates, deposition rates, and film growth rates.
- Measurement of surface roughness.
- Thickness mapping.
Created May 21, 2014, Updated June 15, 2023