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NanoFab Tool: Tousimis Automegasamdri-916B Series C
The Tousimis Supercritical Automegasamdri-916B Series C critical point dryer uses liquid carbon dioxide (LCO2) to dry substrates in a controlled manner in order to release suspended and floating structures on microelectromechanical systems. The critical point dryer uses high temperature and pressure to transition from liquid to gas without crossing a phase boundary, thereby removing the surface tension between the sample and the surrounding liquid. It can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.
Specifications/Capabilities
- Chamber illumination with viewing window to monitor processes.
- Automatic processing for repeatable results.
- High pressure LCO2 used as drying fluid.
Usage Information
Supported Sample Sizes
- Maximum wafer diameter: 200 mm (8 in).
- Small pieces supported: Yes.
Typical Applications
- Microelectromechanical systems (MEMS).
- Drying suspended and floating structures.
- Nondestructive drying of membranes.