Sunday, D.
, List, S.
, Chawla, J.
and Kline, R.
(2016),
Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering, Journal of Microlithography Microfabrication and Microsystems
(Accessed December 26, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Evaluation of Effect of Data Quality on the Profile Uncertainty of Critical Dimension Small Angle X-ray Scattering
Published
Author(s)
, Scott List, Jasmeet Chawla,
Citation
Journal of Microlithography Microfabrication and Microsystems
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created February 17, 2016, Updated February 19, 2017