Practical Guides for X-Ray Photoelectron Spectroscopy: First Steps in Planning, Conducting, and Reporting XPS Measurements

Published

May 15, 2019

Author(s)

Cedric J. Powell, Donald R. Baer, Kateryna Artyushkova, Christopher R. Brundle, James E. Castle, Mark Engelhard, Karen Gaskell, John Grant, Richard Haasch, Matthew Linford, Peter Sherwood, Vincent Smentkowski, Alexander Shard

Abstract

Over the past three decades, the use of x-ray photoelectron spectroscopy (XPS) in research and applications has grown to make XPS the most popular method of surface analysis. There has also been an increase in the number of new or inexperienced users along with an increase in erroneous and misapplications of the method. This article is the first in a series of guides assembled by a committee of experienced XPS practitioners that are intended to assist inexperienced users by providing information about good practices in the use of XPS. This first guide identifies sources of practical information for conducting XPS measurements and examines questions for determining whether XPS can provide the needed or desired information. Many of the topics and questions addressed in this article also apply to other surface-analysis techniques.

Citation

Journal of Vacuum Science & Technology A

Volume

37

Issue

3

Pub Type

Journals

Download Paper

https://doi.org/10.1116/1.5065501

Keywords

practical guide, surface analysis, x-ray photoelectron spectroscopy

Citation

Powell, C. , Baer, D. , Artyushkova, K. , Brundle, C. , Castle, J. , Engelhard, M. , Gaskell, K. , Grant, J. , Haasch, R. , Linford, M. , Sherwood, P. , Smentkowski, V. and Shard, A. (2019), Practical Guides for X-Ray Photoelectron Spectroscopy: First Steps in Planning, Conducting, and Reporting XPS Measurements, Journal of Vacuum Science & Technology A, [online], https://doi.org/10.1116/1.5065501 (Accessed January 2, 2025)