Stephanie Moffitt is a researcher in the Optical Radiation Group of the Sensor Science Division. Her current research is focused on developing metrology for semiconductor technology as part of the Synchrotron Ultraviolet Radiation Facility (SURF III). This work includes characterizing EUV optics durability, calibration of EUV detectors, improving metrology for EUV sources, and development of EUV scatterometry and spectroscopic ellipsometry.
Stephanie began using synchrotron light sources to study oxide materials while getting B.S. in Chemistry from the University of California at Santa Barbara. This led her to Northwestern University where she studied the relationships of structure, property, and performance of amorphous oxide semiconductors. After getting her Ph.D. in Materials Science and Engineering, Dr. Moffitt began studying solar panel materials reliability, specializing in synchrotron-based characterization methods at SLAC National Accelerator Laboratory and the Stanford Synchrotron Radiation Lightsource. In 2019, she joined NIST as a National Research Council postdoctoral fellow.
For a full list of publications, please visit Dr. Moffitt’s Google Scholar Page