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PUBLICATIONS

Modeling Scanning Electron Microscope Measurements with Charging

Published

Author(s)

John S. Villarrubia
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Pub Type
Conferences

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Local Download

Keywords

Charging, contact hole, scanning electron microscopy (SEM), dimensional metrology, mathematical modeling, Monte Carlo simulation
Modeling and simulation research, Dimensional metrology, Nanoelectronics and Nanometrology

Citation

Villarrubia, J. (2013), Modeling Scanning Electron Microscope Measurements with Charging, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912857 (Accessed July 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 3, 2013, Updated February 19, 2017