Cassard, J.
(2001),
MEMS Length and Strain Measurements Using an Optical Interferometer, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6779
(Accessed December 25, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
MEMS Length and Strain Measurements Using an Optical Interferometer
Published
Author(s)
Citation
NIST Interagency/Internal Report (NISTIR) - 6779
Report Number
6779
NIST Pub Series
Pub Type
NIST Pubs
Download Paper
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 21, 2001, Updated January 27, 2020