A Monolithic Implementation of Interface Circuitry for CMOS Compatible Gas-Sensor System

Published

July 1, 2002

Author(s)

Muhammad Afridi, John S. Suehle, Mona E. Zaghloul, David W. Berning, Allen R. Hefner Jr., Stephen Semancik, Richard E. Cavicchi

Abstract

A monolithic CMOS micro-gas-sensor system, designed and fabricated in a standard CMOS process, is described. The gas-sensor system incorporates an array of four microhotplate-based gas-sensing structures. The system utilizes a thin film of tin-oxide (SnO₂) as a sensing material. The interface circuitry on the chip has digital decoders to select each element of the sensing array, and an operational amplifier to monitor the change in conductance of the film. The chip is post-processed to create microhotplates using bulk micro-machining techniques. Measurements are presented for various portions of the interface circuitry used for the gas sensor system.

Proceedings Title

Proc., ISCAS

Volume

2

Conference Dates

May 26-29, 2002

Conference Location

Scottsdale, AZ, USA

Conference Title

IEEE International Symposium on Circuits and Systems

Pub Type

Conferences

Download Paper

Local Download

Keywords

Array, Gas Sensor, Interface Circuit, MEMS, Microhotplate, Micromachining, Monolithic, Post Processing

Citation

Afridi, M. , Suehle, J. , Zaghloul, M. , Berning, D. , Hefner Jr., A. , Semancik, S. and Cavicchi, R. (2002), A Monolithic Implementation of Interface Circuitry for CMOS Compatible Gas-Sensor System, Proc., ISCAS, Scottsdale, AZ, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24558 (Accessed December 26, 2024)