Olthoff, J.
, Van Brunt, R.
and Radovanov, S.
(1995),
Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21683
(Accessed December 26, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges
Published
Author(s)
, , S. B. Radovanov
Citation
Applied Physics Letters
Volume
67
Issue
4
Pub Type
Journals
Download Paper
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created June 30, 1995, Updated October 12, 2021