U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes

Published

Author(s)

A Schwabedissen, Eric C. Benck, J R. Roberts
Citation
Plasma Sources Science & Technology
Volume
7
Pub Type
Journals

Citation

Schwabedissen, A. , Benck, E. and Roberts, J. (1998), Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes, Plasma Sources Science & Technology (Accessed December 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1998, Updated February 17, 2017