Babushok, V.
, Tsang, W.
and Zachariah, R.
(1999),
Inhibiting Silane Pyrophoricity, 1st International Symposium on Environmental Issues with Materials and Processes for the Electronic and Semiconductor Industries, Pennington, NJ
(Accessed April 28, 2025)
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Inhibiting Silane Pyrophoricity
Published
Author(s)
, , R Zachariah m
Proceedings Title
1st International Symposium on Environmental Issues with Materials and Processes for the Electronic and Semiconductor Industries
Conference Location
Pennington, NJ
Conference Title
Proceedings of the 1st International Symposium on Environmental Issues with Materials and Processes for the Electronic and Semiconductor Industries
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 1, 1999, Updated February 17, 2017