Yang, S.
, Lee, V.
, Sun, J.
, Gidley, D.
, Mirau, P.
, Pai, C.
, Nalamasu, O.
, Reichmanis, E.
, Pai, J.
, Obeng, Y.
, Seputro, J.
and Lin, E.
(2002),
Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers, Chemistry of Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853817
(Accessed July 18, 2024)
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Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers
Published
Author(s)
S Y. Yang, V. J. Lee, J N. Sun, D W. Gidley, P A. Mirau, C S. Pai, O Nalamasu, E Reichmanis, J C. Pai, , J Seputro,
Citation
Chemistry of Materials
Volume
14(1)
Pub Type
Journals
Download Paper
Keywords
Dielectric Properties, Electronic Materials, Mechanical Properties, Nanostructured Materials, Reflectivity, Scattering, Thin Films, low-k dielectric, nanoporous thin film, organosilicate, positronium annihiliation lifetime spect, small angle neutron scattering, triblock copolymers, x-ray reflectivity
Citation
Issues
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Created December 31, 2001, Updated October 12, 2021