Gillaspy, J.
(2008),
Fundamental Atomic Xenon Data for EUV Source Modeling, SPIE
(Accessed March 13, 2025)
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Fundamental Atomic Xenon Data for EUV Source Modeling
Published
Author(s)
Citation
SPIE
Pub Type
Journals
Keywords
atomic data, benchmarking, cross sections, electron beam ion trap (EBIT, energy levels, euv light sources, euv lithography, wavelengths, xenon
Citation
Issues
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Created October 16, 2008