Teague, E.
(1995),
1/N Feynman Machines as a Path to Ultraminiaturization, Proceedings of SPIE, Microlithography and Metrology in Micromachining, Michael T. Postek, Editor, Austin, TX
(Accessed March 13, 2025)
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.