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PUBLICATIONS

Stylus-Laser Surface Calibration System

Published

Author(s)

Theodore V. Vorburger, Jun-Feng Song, T Giauque, Thomas Brian Renegar, Eric P. Whitenton, M Croarkin

Abstract

A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser interferometer is mounted on the traversing unit of the stylus instrument to calibrate the instrument in the horizontal direction. The calibration uncertainty (¿2¿) for SRM 2075 is ¿1.2% for roughness calibrations ((Ra = 1 ¿m), and ¿0.06% for spatial wavelength calibrations (Sm = 800 ¿m).
Citation
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume
19(2-3)
Pub Type
Journals

Keywords

calibration, roughness, sinusoidal profiles, stylus instruments, stylus-laser, surface texture, traceability, uncertainty
Metrology and Manufacturing

Citation

Vorburger, T. , Song, J. , Giauque, T. , Renegar, T. , Whitenton, E. and Croarkin, M. (1996), Stylus-Laser Surface Calibration System, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology (Accessed December 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 30, 1996, Updated October 12, 2021