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PUBLICATIONS

Reliability Metrology for the Semiconductor Industry at NIST

Published

Author(s)

Stephen Knight, John S. Suehle, Joaquin (. Martinez

Abstract

The National Institute of Standards and Technology provides critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronics era into the nanoelectronics era. This presentation will describe the National Semiconductor Metrology Program, a program assisting the semiconductor manufacturing industry and its supporting infrastructure industries by developing critical metrology. A key emphasis of many of the projects is accurate assessment of reliability.
Proceedings Title
GOMACTech-04: Transformational Technologies
Conference Dates
March 15-18, 2004
Conference Location
Monterey, CA, USA
Conference Title
GOMACTech-04: Transformational Technologies
Pub Type
Conferences

Keywords

CMOS, molecular electronics, nanoelectronics, reliability

Citation

Knight, S. , Suehle, J. and Martinez, J. (2004), Reliability Metrology for the Semiconductor Industry at NIST, GOMACTech-04: Transformational Technologies, Monterey, CA, USA (Accessed March 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 9, 2004, Updated October 12, 2021