Smee, S.
, Gaitan, M.
, Joshi, Y.
and Blackburn, D.
(1998),
MEMS-Based Test Structures for IC Technology, Proc., ASME, Anaheim, CA, USA
(Accessed June 30, 2024)
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.