Schafft, H.
, Mayo, S.
, Jones, S.
and Suehle, J.
(1995),
An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines, 1994 IEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA
(Accessed July 27, 2024)
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An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines
Published
Author(s)
, , ,
Proceedings Title
1994 IEEE International Integrated Reliability Workshop Final Report
Conference Dates
October 16-19, 1994
Conference Location
Lake Tahoe, CA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1995, Updated October 12, 2021