Marchiando, J.
, Kopanski, J.
and Lowney, J.
(1998),
A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Journal of Vacuum Science and Technology
(Accessed March 14, 2025)
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A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published
Author(s)
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Citation
Journal of Vacuum Science and Technology
Volume
B. 16
Issue
1
Pub Type
Journals
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Created January 31, 1998, Updated October 12, 2021