Dura, J.
, Richter, C.
, Majkrzak, C.
and Nguyen, N.
(1998),
Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO<sub>2</sub> on Si, Applied Physics Letters
(Accessed December 26, 2024)
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Neutron Reflectometry, X-Ray Reflectometry, and Spectroscopic Ellipsometry Characterization of Thin SiO2 on Si
Published
Author(s)
, , ,
Citation
Applied Physics Letters
Volume
73
Issue
15
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created October 11, 1998, Updated October 12, 2021