Panchawagh, H.
, Serrell, D.
, Faheem, F.
, Herrmann, C.
, Finch, D.
and Mahajan, R.
(2005),
Packaging of In-Plane Micro-Actuators for BioMEMS Applications, Microtechnologies inb Medicine and Biology, Oahu, HI, USA, [online], https://doi.org/10.1115/IMECE2005-82528
(Accessed August 31, 2024)