The Nanoscale Spectroscopy Group harnesses light-matter interactions for nanoscale metrology of materials and devices in critical and emerging technologies. The group’s current expertise includes nanoscale scanned-probe spectroscopy, optical techniques for spectroscopy and dynamics, manipulation of matter on the nanoscale, electronic and photonic device physics, optoelectronic characterization of individual nano structures, and advancing metrology for defect-based devices. These capabilities are applied in research programs that support development in applications such as optoelectronics, future semiconductor electronics, quantum sensing, and quantum information science.