Levine, Z.
, Grantham, S.
, Neogi, S.
, Frigo, S.
, McNulty, I.
, Retsch, C.
, Wang, Y.
and Lucatorto, T.
(2001),
Accurate pattern registration for integrated circuit tomography, Journal of Applied Physics
(Accessed October 31, 2024)
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Accurate pattern registration for integrated circuit tomography
Published
Author(s)
, , S Neogi, S P. Frigo, I McNulty, C C. Retsch, ,
Citation
Journal of Applied Physics
Volume
90
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2001, Updated February 17, 2017