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PUBLICATIONS

Advancing Measurement Science for Microelectronics: CHIPS R&D Metrology Program

Published

Author(s)

Marla L. Dowell, Hannah Brown, Gretchen Greene, Paul D. Hale, Brian Hoskins, Sarah Hughes, Bob R. Keller, R Joseph Kline, June W. Lau, Jeff Shainline

Abstract

The CHIPS and Science Act of 2022 called for NIST to "carry out a microelectronics research program to enable advances and breakthroughs....that will accelerate the underlying R&D for metrology of next-generation microelectronics and ensure the competitiveness and leadership of the United States....", NIST is leveraging its measurement science expertise, standards development contributions, and stakeholder engagement practices to address the highest priority metrology challenges identified across industry, academia, and government agencies. The program expands upon NIST's strong track record of supporting the semiconductor technology and manufacturing ecosystem by developing, advancing, and deploying measurement technologies that are accurate, precise, and fit-for-purpose.
Proceedings Title
E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024
Conference Dates
April 15-18, 2024
Conference Location
Monterey, CA, US
Conference Title
2024 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Pub Type
Conferences

Keywords

Metrology, semiconductor, microelectronics, materials, standards, manufacturing
Standards, Physics, Nanotechnology, Materials and Electronics

Citation

Dowell, M. , Brown, H. , Greene, G. , Hale, P. , Hoskins, B. , Hughes, S. , Keller, B. , Kline, R. , Lau, J. and Shainline, J. (2024), Advancing Measurement Science for Microelectronics: CHIPS R&D Metrology Program, E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024, Monterey, CA, US (Accessed November 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 13, 2024