Chandler-Horowitz, D.
(1986),
Analytic analysis of ellipsometric errors:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-78
(Accessed October 31, 2024)
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Analytic analysis of ellipsometric errors:
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- NBS SP 400-78
Report Number
NBS SP 400-78
Pub Type
NIST Pubs
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Created January 1, 1986, Updated May 19, 2023