U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process

Published

Author(s)

Richard A. Allen, Michael W. Cresswell, Loren W. Linholm, Jinsheng Wen, Colleen E. Hood, T. A. Hill, J. D. Benecke, S. R. Volk, H. D. Stewart
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
7
Issue
158
Conference Dates
March 22-24, 1994
Conference Location
San Diego, CA, USA
Pub Type
Conferences

Citation

Allen, R. , Cresswell, M. , Linholm, L. , Wen, J. , Hood, C. , Hill, T. , Benecke, J. , Volk, S. and Stewart, H. (1994), Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process, Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA (Accessed January 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 30, 1994, Updated October 12, 2021