Gillen, J.
, Wight, S.
, Chi, P.
, Fahey, A.
, Verkouteren, J.
, Windsor, E.
and Fenner, D.
(2003),
Bevel Depth Profiling SIMS for Analysis of Layer Structures, Characterization and Metrology for ULSI Technology: AIP Conference Proceedings, Austin, TX
(Accessed October 31, 2024)