Band, A.
and Stroscio, J.
(1996),
A Closed Loop Controller for Electron-beam Evaporators, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620464
(Accessed October 31, 2024)
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A Closed Loop Controller for Electron-beam Evaporators
Published
Author(s)
,
Abstract
A simple instrument for automatically controlling the deposition rate of an electronbeam evaporator is described. The design incorporates a commercially available, microprocessor based, Proportional-Integral-Differential (PID) process controller which provides loop control and automatic determination of optimal proportional, integral and differential loop constants. A logarithmic amplifier is used to linearize the overall loop response. The controller is used in conjunction with a compact electron-beam heated evaporator.Citation
Review of Scientific Instruments
Volume
67
Issue
6
Pub Type
Journals
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Created January 1, 1996, Updated February 19, 2017