Benkstein, K.
, Montgomery, C.
, Vaudin, M.
and Semancik, S.
(2005),
The Development and Evaluation of TiO<sub>2</sub> Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms, Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society
(Accessed December 21, 2024)
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The Development and Evaluation of TiO2 Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms
Published
Author(s)
, , ,
Proceedings Title
Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society
Volume
828
Conference Dates
November 29-December 2, 2004
Conference Title
Materials Research Society Symposium Proceedings
Pub Type
Conferences
Keywords
conductometric gas sensor, nanoparticle, porous film, TiO2
Citation
Issues
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Created January 1, 2005, Updated February 17, 2017