U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Dynamic Model of the RF-Powered Sheath in Highly Asymmetric RF Discharges

Published

Author(s)

Mark A. Sobolewski
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
56
Pub Type
Journals

Citation

Sobolewski, M. (1997), Dynamic Model of the RF-Powered Sheath in Highly Asymmetric RF Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed October 31, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 1, 1997, Updated February 17, 2017