Roitman, P.
, Mayo, S.
, Simons, D.
, Krause, S.
, Park, J.
, Lee, J.
, Venables, D.
, Lenahan, P.
and Conley, J.
(1994),
Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing, Proc., Electrochemical Society International Symposium on SOI Technology and Devices, San Francisco, CA, USA
(Accessed December 26, 2024)
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Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing
Published
Author(s)
, , , S. J. Krause, J Park, J. H. Lee, D. Venables, Patrick M. Lenahan, J. F. Conley
Proceedings Title
Proc., Electrochemical Society International Symposium on SOI Technology and Devices
Conference Dates
May 22-27, 1994
Conference Location
San Francisco, CA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1994, Updated October 12, 2021