Suehle, S.
, Linholm, L.
and Marshall, G.
(1982),
Evaluation of a CMOSSOS process using process validation wafers:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.82-2514
(Accessed July 27, 2024)
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Evaluation of a CMOSSOS process using process validation wafers:
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- NBS IR 82-2514
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NBS IR 82-2514
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NIST Pubs
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Created January 1, 1982, Updated May 19, 2023