Mattis, R.
and Buehler, M.
(1983),
A FORTRAN program for analysis of data from microelectronic test structures:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-75
(Accessed October 31, 2024)
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A FORTRAN program for analysis of data from microelectronic test structures:
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- NBS SP 400-75
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NBS SP 400-75
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NIST Pubs
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Created January 1, 1983, Updated May 19, 2023