El, D.
, Seifert, F.
, Schlamminger, S.
, Chao, L.
, Newell, D.
and Pratt, J.
(2014),
Heterodyne interferometer with subnanometer accuracy, CPEM 2014 Digest, Rio de Janeiro, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915347
(Accessed January 14, 2025)