Vorburger, T.
, Dagata, J.
, Wilkening, G.
and Iizuka, K.
(1997),
Industrial Uses of STM and AFM, Annals CIRP
(Accessed April 23, 2025)
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Industrial Uses of STM and AFM
Published
Author(s)
, , G. Wilkening, K Iizuka
Abstract
We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications on-line in manufacturing. We also discuss the role of metrology for certain applications and briefly review many other types of SPMs besides STM and AFM. We conclude by emphasizing ultra-precision positioning, nanofabrication, and biomedical applications as important future directions in the field.Citation
Annals CIRP
Volume
47(2)
Pub Type
Journals
Keywords
atomic force microscopy (AFM), Scanning probe microscopy (SPM), Scanning tunneling microscopy (STM)
Citation
Issues
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Created December 31, 1996, Updated October 12, 2021