Olthoff, J.
, Van Brunt, R.
and Sobolewski, M.
(1992),
Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges, Proc. TenthInternational Conference on Gas Discharges and Their Applications, Swansea, 1, UK, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26700
(Accessed January 2, 2025)
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Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges
Published
Author(s)
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Proceedings Title
Proc. TenthInternational Conference on Gas Discharges and Their Applications
Conference Dates
September 13-18, 1992
Conference Location
Swansea, 1, UK
Pub Type
Conferences
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Citation
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Created August 31, 1992, Updated October 12, 2021