Hurley, D.
, Kopycinska-Mueller, M.
and Kos, T.
(2007),
Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy, Jom, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50435
(Accessed December 21, 2024)
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Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy
Published
Author(s)
, , Tony B. Kos
Abstract
We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures.Citation
Jom
Volume
59
Issue
1
Pub Type
Journals
Download Paper
Keywords
atomic force microscopy, mechanical properties, atomic force acoustic microscopy, nanomechanics
Citation
Issues
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Created January 30, 2007, Updated October 12, 2021