Vartanian, V.
, Allen, R.
, Humler, K.
, Olsen, S.
, Sapp, B.
and Smith, L.
(2014),
Metrology Needs for 2.5D/3D Interconnect, Handbook of 3D Integration: Volume 3, Wiley, Malden, MA, [online], https://doi.org/10.1002/9783527670109.ch29
(Accessed October 31, 2024)