Scace, R.
(1991),
Metrology for the Semiconductor Industry, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed October 31, 2024)
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Metrology for the Semiconductor Industry
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NIST Interagency/Internal Report (NISTIR) -
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NIST Pubs
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Created September 30, 1991, Updated February 17, 2017