Scace, R.
(1991),
Metrology for the semiconductor industry:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.4653
(Accessed October 31, 2024)
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Metrology for the semiconductor industry:
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Author(s)
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- NIST IR 4653
Report Number
NIST IR 4653
Pub Type
NIST Pubs
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Created January 1, 1991, Updated May 19, 2023