Devaney, J.
(1977),
Notes on SEM examination of microelectronic devices:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-35
(Accessed December 21, 2024)
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Notes on SEM examination of microelectronic devices:
Published
Author(s)
Citation
- NBS SP 400-35
Report Number
NBS SP 400-35
Pub Type
NIST Pubs
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Created January 1, 1977, Updated May 19, 2023